Enhanced selective hydrogen desorption from metals
نویسندگان
چکیده
منابع مشابه
Thermal-hydrogen promoted selective desorption and enhanced mobility of adsorbed radicals in silicon film growth.
Car-Parrinello simulations and static density-functional theory calculations reveal how hydrogen promotes growth of epitaxial, ordered Si films in plasma-enhanced chemical vapor deposition at low-temperature conditions where the exposed Si(001)-(2x1) surface is fully hydrogenated. Thermal H atoms, indeed, are shown to selectively etch adsorbed silyl back to the gas phase or to form adsorbed spe...
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J. Farjas, D. Das, J. Fort, P. Roura, and E. Bertran GRMT, Departament de Fı́sica, Universitat de Girona, Campus Montilivi, Edif.PII, E17071-Girona, Catalonia, Spain Department of Physics, Ramakrishna Mission College, Narendrapur IY3508, West Bengal, India FEMAN, Departament de Fı́sica Aplicada i Optica, Universitat de Barcelona, Diagonal 647, 4 planta, E08028-Barcelona, Catalonia, Spain ~Receive...
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T h e r m a l desorption spectroscopy (TDS) based on the mass spectroscopy of thermal ly evolved hydrogen is used for desorption analysis of amorphous hydrogenated silicon (a-Si:H). Two series of glow discharge chemical vapour deposited a-Si:H were investigated by the T D S method . Cons tan t t e m p e r a t u r e growth ra te enabled to determine t empera tu re regions of hydrogen evolution a...
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ژورنال
عنوان ژورنال: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
سال: 1983
ISSN: 0734-2101,1520-8559
DOI: 10.1116/1.572087